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Resources for Equipment and Laboratory Supplies
Objective
This checklist identifies minimum facilities, equipment
and supplies that are necessary and sufficient to provide authentic learning
experiences for the mastery of work-related competencies in semiconductor
manufacturing technology and related support industries. This list is not
intended to be exhaustive or exclusive. Individual programs will augment
this list with specific equipment and supplies to support the unique
requirements of the program and industry partners.
Audience
College administrators, faculty and others involved in
the design and development of instructional laboratories for semiconductor
and other advanced technology manufacturing programs at two-year degree
granting institutions.
Purpose
- To serve as a guide for planning and equipping facilities for
semiconductor manufacturing technology programs.
- To identify critical laboratory resources needed to support
performance based assessment of learned competencies in a semiconductor
manufacturing technology curriculum.
For further information on this checklist, contact MATEC@matec.org
CHEMISTRY LABORATORY & EQUIPMENT CHECKLIST
Fume Hood
www.vwrsp.com
Cost: $4,000-6,000
Wet Bench with Chemical/Acid Storage’s
Fisher Scientific 1-800-766-7000
www.fishersci.com
Cost: $4,000-6,000
Chemical Disposal
Fisher Scientific 1-800-766-7000
www.fishersci.com
Cost: $3,000 & above
Deionized H2O System
Fisher Scientific 1-800-766-7000
www.fishersci.com
Cost: $2,000-4,000 depending on volume & quantity
Showers & Eye Bath
Fisher Scientific1-800-766-7000
www.fishersci.com
Cost: $500-1,000
Oscilloscope
www.fluke.com
- Hewlett Packard, Electronics Division 1-800-452-4844
www.tmo.hp.com
www.tek.com
847-821-1900
Cost: $1,500-2,000
DC Power Supply (Triple Output)
www.fluke.com
- Hewlett Packard, Electronics Division 1-800-452-4844
www.tmo.hp.com
www.tek.com
847-821-1900
Cost: $400-500
Multimeter
www.fluke.com
- Hewlett Packard, Electronics Division 1-800-452-4844
www.tmo.hp.com
www.tek.com
847-821-1900
Cost: $100-150
Function Generator
www.fluke.com
- Hewlett Packard, Electronics Division 1-800-452-4844
www.tmo.hp.com
www.tek.com
847-821-1900
Cost: $200-250
Soldering Stations
(information not available at this time)
Vacuum Trainer
www.varian.com
www.mksinst.com
Cost: $18,000-20,000 and $8,000-10,000
RF Generator & Matching Network
- RF Services, Inc. 1-800-553-9106
www.rfservices.com
- Advanced Energy Systems 603-654-3922
Cost: $6,000-7,000
AC, DC, Stepper Motors and/or Trainers Lab
- Sun Equipment Corporation 919-870-1955
- TII-Technical Education Systems 1-800-451-2169
www.tii-tech.com
847-821-1900
Cost: $4,000 and above
Industrial Sensors, Lab Components or Trainers
TII – Technical Education Systems 1-800-451-2169
www.tii-tech.com
Cost: $3,000
Pneumatics, Lab Components or Trainers
- SMC Corporation 317-899-4440
www.smcusa.com
- Bima (not able to locate phone number at this time)
- Clifford (not able to locate phone number at this time)
- TII-Technical Education Systems 1-800-451-2169
www.tii-tech.com
847-821-1900
Cost: $10,000 and above
Hydraulics, Lab Components or Trainers
www.hampton.com
- Parker Hannifin Corp 256-881-2040
www.parker.com
- Vikers (not able to locate phone number at this time)
- Energy Concepts, Inc.
847-821-1900
Cost: $10,000 and above
Programmable Logic Controllers
- Allen-Bradley Company, Phoenix (602) 944-3303
www.ab.com
- TII – Technical Education Systems 1-800-451-2169
www.tii-tech.com
847-821-1900
Cost: $4,000 and above
Single Wafer Spin Processor (Spin on photoresist)
Laurell Technologies Corp 215-699-7278
www.laurell.com
Cost: $12,000
Oven (Chem Lab Approved) (Suitable for photoresist hard bake)
- Fisher Scientific 1-800-766-7000
www.fishersci.com
www.vrwsp.com
Cost: $1,100-1,200
Microscope (suitable for wafer inspection)
VWR 1-800-932-5000
www.vrwsp.com
Cost: $3,000-4,000
Furnace, 6 inch tube type (Suitable for oxidation & diffusion, temps
=1100-1200°C)
VWR 1-800-932-5000
www.vrwsp.com
Cost: $4,000-6,500
Hot Plate
(Suitable for soft photoresist bake)
VWR 1-800-932-5000
www.vrwsp.com
Cost: $200-700
Ultra-Violet Light Exposure System (can be custom built, contact MATEC
for construction plans)
Source of UV Light Bulbs – Fisher Scientific 1-800-766-7000
www.fishersci.com
Cost: less than $200
Pressurized N2 Gas Cylinders (Dry wafers during process steps)
Contact local gas distributor
Cost: Variable depending on volume & quantity used
Quartzware (Suitable for furnace use)
Quartz International 505-797-7500
www.quartz.com
4 or 6 inch wafers
Possible source……Industry donations?
Cost: Variable
Wafer Boats/Carriers
Fluoroware 612-448-3131
www.fluoroware.com
Cost: Variable
REUSEABLE & DISPOSABLE PROTECTIVE WEAR & GARMENTS
Bunny Suits, Hoods, Booties, Hair Nets, Masks, Vinyl Gloves, Latex
Gloves, Solvent Acid Gloves
Fisher Safety "Products for Controlled Environments" Catalog
1-800-772-6733 www.fishersci.com
Cost: Variable
CHEMICALS
Photoresist – positive resist
Propylene Glycol Monomethyl, Ether Acetate, PMA, PGMEA
- J.T. Baker 1-800-582-2537
www.jtbaker.com or www.mallchem.com
- Olin Chemical (not able to locate phone number at this time)
- Fisher Chemicals 1-800-227-6701
Cost: $500/gal
Resist Strip
Tetramthylammonium Hydroxide, Propanediaol, Methyl
- J.T. Baker 1-800-582-2537\
www.jtbaker.com
- Olin Chemical (not able to locate phone number at this time)
- Fisher Chemicals 1-800-227-6701
www.fishersci.com
Cost: $72/gal
Developer
Tetramthylammonium Hydroxide + Water
- J.T. Baker 1-800-582-2537
www.jtbaker.com
- Olin Chemical (not able to locate phone number at this time)
- Fisher Chemicals 1-800-227-6701
www.fishersci.com
Cost: $30/gal
Acetone, used as EBR and cleaner
- J.T. Baker 1-800-582-2537
www.jtbaker.com
- Olin Chemical (not able to locate phone number at this time)
- Fisher Chemicals 1-800-227-6701
www.fishersci.com
Cost: $18/gal
*For Material Safety Data Sheets, request from vendor.
SELECTED VENDORS, SUPPLIERS AND CONTACTS
1. Brady
Signmark Division
2221 West Camden Road
P.O. Box 2999
Milwaukee, WI 53201-2999
Toll-Free: (800) 635-7557
In Milwaukee: (414) 228-1411
Fax: (800) 445-7446
www.bradysignmark.com
2. Consolidated Plastics Company, Inc.
8181 Darrow Road
Twinsburg, OH 44087
General: (800) 362-1000
(216) 425-3900
Fax: (216) 425-3333
Consolidated Plastics products contains storage bins, clothing, bags,
gloves, and other items that are produced with plastics.
3. Craftsman
Sears Power & Hand Tools
20 Presidential Drive
Roselle, IL 60172
General: (800) 377-7414
Fax: (800) 390-8792
www.sears.com/craftsman
Craftsman carries a selection of hand and power tools.
4. Fluoroware
102 Jonathan Boulevard North
Chaska, MN 55318
General: (612) 368-8694
Fax: (612) 368-8022
www.fluoroware.com
Fluoroware is a great source for wafer boats used in the assembly
line process. They supply us with acid boats, tweezers, cassette holders
and cassette boxes.
5. Grinnell Corporation
Power-strut
16100 South Lathrop Avenue
Harvey, IL 60426
Phone: (708) 339-1610
Power-strut contains a full line of support beams and brackets to
build your cleanroom or laboratory.
6. HPS Division
MKS Instruments, Inc.
5330 Sterling Drive
Boulder, CO 80301
General: (800) 345-1967
(303) 449-9861
Fax: (303) 442-6880
www.mksinst.com
HPS has a full line of vacuum instruments and attachment components.
7. Kurt J. Lesker Company
1515 Worthington Avenue
Clairton, PA 15025
Phone: (412) 233-4200
(800) 245-1656
Fax: (412) 233-4375
www.lesker.com
8. National Bag Company, Inc.
2233 Mill Road
Hudson, OH 44236
Phone: (216) 425-2600
(800) 247-6000
National Bag contains bags, boxes, lab gowns, and wrapping supplies.
9. Parker Hannifin Corporation
Instrumentation Connectors Division
P.O. Box 400004-1504
Huntsville, AL 35815-1504
General: (205) 881-2040
Fax: (205) 881-5730
www.parker.com
Parker Hannifin specializes in instrument pipe fittings.
10. Ryan Herco Products Corporation
Corporate Headquarters
P.O. Box 588
2509 North Naomi Street
Burbank, CA 91503
Phone: (800) 848-1141
www.ryanherco.com
Ryan Herco contains a full line of pumps, valves, pipes, and storage
containers for movement and handling chemicals.
11. Seton Name Plate Company
Department AE-5A
20 Thompson Road
P.O. Box 819
Branford, CT 06405-0819
General: (800) 243-6624
Fax: (800) 345-7819
www.seton.com
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