Other National Initiatives

The University of Arizona < http://www.arizona.edu > (lead institution), the Massachusetts Institute of Technology < http://web.mit.edu >, Stanford University < http://www.stanford.edu >, and the University of California at Berkeley < http://www.berkeley.edu > have established an Engineering Research Center (ERC) in the area of Environmentally Benign Semiconductor Manufacturing. The vision of the center is to create and develop the science, technology, and educational methods that will lead to future semiconductor manufacturing facilities with minimal consumables (e.g., water, energy, acids, solvents, and gases) and minimum emission of waste materials. The Center will implement this vision through a carefully planned balance of approaches to both present-day and anticipated ESH problem areas, seeking to integrate environmental aspects early when a new process or tool is being developed