Play the Questor Game to answer questions on Photolithography.
Explain the three (3) primary stages of the photolithography process. Describe the steps the photolithography equipment uses to process a pattern on a silicon wafer. Describe the coater equipment modules and their purposes. Describe the purpose of the exposure equipment. Describe the four printing methods. Describe the purpose of the primary subsystems of an exposure tool. Describe the process steps and recipe settings for a coater, an exposure tool, and a developer.
Play the Questor Game to answer questions on Metallization.
Explain the purpose of the metallization process. Explain the function of metal layers in integrated circuits. Describe the properties of metal films that are used in semiconductor manufacturing. List the different types of metals used and their properties. Describe the critical parameters to be controlled in the sputtering process. Sequence the primary steps in the general metallization process. Sequence the primary steps in the sputtering process. Compare and contrast the effectiveness of the different metallization techniques. Discuss the effect of the process parameters on metallization. Describe the goals of metrology in metallization processing. List the characteristics of a successful metallization process. Describe the goals of metrology in metallization processing. Determine the thickness of deposited metal layer. -Calculate resistance.